EDS Detectors for Electron Microscopy

EDS is an invaluable technique providing elemental composition information in direct relation to the Electron Microscope image for both Scanning Electron Microscopes (SEM) and Transmission Electron Microscopes (TEM). RaySpec has a wealth of experience in the design and manufacture of energy dispersive x-ray detectors used for EDS (Energy Dispersive Spectroscopy) on both SEMs and TEMs.

The Energy Dispersive X-Ray detector (EDS) is mounted on a suitable vacuum port on the SEM or TEM chamber, and is used to detect the characteristic fluorescence x-rays emitted from the sample as a result of excitation by the imaging electron beam.

Crucial design parameters include correct mechanical geometry, high collection efficiency, good low energy response and immunity to scattered electrons, without affecting the primary imaging function of the electron beam.

RaySpec provides a range of EDS x-ray detectors suitable for use with commercially available SEMs and TEMs. The detector is designed to optimise important parameters such as working distance and take off angle to meet the exacting requirements of modern electron microscopy scientists.

The SiriusSD range of EDS SDD detectors has been developed to provide state-of-the-art performance for today’s range of analytical SEMs and TEMs, with sensor active areas of 10, 30, 60 and 100mm² available.